{"product_id":"characterization-of-stress-in-gan-on-sapphire-microelectromechanical-systems-structures-using-micro-raman-spectroscopy-1288368518","title":"Characterization of Stress in GaN-on-Sapphire Microelectromechanical Systems Structures Using Micro-Raman Spectroscopy","description":"\u003cp\u003e\u003cstrong\u003eISBN:\u003c\/strong\u003e 1288368518\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eAuthor:\u003c\/strong\u003e Parada, Francisco E\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eCondition:\u003c\/strong\u003e New\u003c\/p\u003e\u003cp\u003eMicro-Raman ( Raman) spectroscopy is an e cient, non-destructive techniquewidely used to determine the quality of semiconductor materials and microelectrome-chanical systems. This work characterizes the stress distribution in wurtzite gal-lium nitride grown on c-plane sapphire substrates by molecular beam epitaxy. Thiswide bandgap semiconductor material is being considered by the Air Force ResearchLaboratory for the fabrication of shock-hardened MEMS accelerometers.\u003c\/p\u003e","brand":"Mia Karts","offers":[{"title":"Default Title","offer_id":51968880869664,"sku":"NEW1288368518","price":19.14,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0980\/7426\/3840\/files\/71A00w1jDuL.jpg?v=1783716522","url":"https:\/\/miakarts.com\/products\/characterization-of-stress-in-gan-on-sapphire-microelectromechanical-systems-structures-using-micro-raman-spectroscopy-1288368518","provider":"Miakarts Books","version":"1.0","type":"link"}