{"product_id":"electrical-activation-studies-of-silicon-implanted-alxga1-xn-1286861446","title":"Electrical Activation Studies of Silicon Implanted Alxga1-Xn","description":"\u003cp\u003e\u003cstrong\u003eISBN:\u003c\/strong\u003e 1286861446\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eAuthor:\u003c\/strong\u003e Zens, Timothy W\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eCondition:\u003c\/strong\u003e New\u003c\/p\u003e\u003cp\u003eElectrical activation studies of silicon implanted AlxGa1-xN grown on sapphire substrates were conducted as a function of ion dose, anneal temperature, and anneal time. Silicon ion doses of 1x10 13, 5x10 13, and 1x10 14 cm -2 were implanted in AlxGa1-xN samples with aluminum mole fractions of 0.1 and 0.2 at an energy of 200 keV at room temperature. The samples were annealed at temperatures 1100 to 1350 degrees C and anneal times 20 to 40 minutes. The Hall coefficient and resistivity were measured using room temperature Hall effect measurements. Activation efficiencies of almost 100% were achieved for Al0.2Ga0.8N samples having doses of 5x10 13 cm-2 after annealing at 1350 and 1300 degrees C, respectively, for 20 minutes. After annealing at 1250 degrees C for 20 minutes, 87% efficiency was achieved for Al0.1Ga0.9N implanted with 1x10 14 cm -2 silicon ions. The largest mobility was 89 cm2\/V-s for Al0.1Ga0.9N implanted with 1x10 14 cm -2 and 5x10 13 cm-2 silicon ions and annealed at 1250 degrees C for 20 minutes and at 1200 degrees C for 40 minutes, respectively. The optimal anneal condition to maximize electrical activation efficiency and minimize nitrogen dissociation damage for Al0.1Ga0.9N was 1200 degrees C anneal for 30 minutes. The mobilities, sheet carrier concentrations, and electrical activation efficiencies generally increased.\u003c\/p\u003e","brand":"Mia Karts","offers":[{"title":"Default Title","offer_id":51961416286496,"sku":"NEW1286861446","price":19.14,"currency_code":"USD","in_stock":true}],"url":"https:\/\/miakarts.com\/products\/electrical-activation-studies-of-silicon-implanted-alxga1-xn-1286861446","provider":"Miakarts Books","version":"1.0","type":"link"}