{"product_id":"plasma-etching-fundamentals-and-applications-series-on-semiconductor-science-and-technology-019856287x","title":"Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)","description":"\u003cp\u003e\u003cstrong\u003eISBN:\u003c\/strong\u003e 019856287X\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eAuthor:\u003c\/strong\u003e Sugawara, M.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eCondition:\u003c\/strong\u003e New\u003c\/p\u003e\u003cp\u003eThis book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical theory, plasma physics, and plasma diagnostics, before proceeding to the details of the etching process.\u003c\/p\u003e","brand":"Mia Karts","offers":[{"title":"Default Title","offer_id":51667095290144,"sku":"NEW019856287X","price":256.49,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0980\/7426\/3840\/files\/61zbgLGN9vL.jpg?v=1778958027","url":"https:\/\/miakarts.com\/products\/plasma-etching-fundamentals-and-applications-series-on-semiconductor-science-and-technology-019856287x","provider":"Miakarts Books","version":"1.0","type":"link"}