{"product_id":"run-to-run-control-in-semiconductor-manufacturing-0849311780","title":"Run-to-Run Control in Semiconductor Manufacturing","description":"\u003cp\u003e\u003cstrong\u003eISBN:\u003c\/strong\u003e 0849311780\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eAuthor:\u003c\/strong\u003e Moyne, James\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eCondition:\u003c\/strong\u003e New\u003c\/p\u003e\u003cp\u003eRun-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine \"runs,\" thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.\u003c\/p\u003e","brand":"Mia Karts","offers":[{"title":"Default Title","offer_id":51892308607264,"sku":"NEW0849311780","price":294.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0980\/7426\/3840\/files\/71e3GWdGL0S.jpg?v=1781984092","url":"https:\/\/miakarts.com\/products\/run-to-run-control-in-semiconductor-manufacturing-0849311780","provider":"Miakarts Books","version":"1.0","type":"link"}