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Chemical Mechanical Planarization of Semiconductor Materials

Chemical Mechanical Planarization of Semiconductor Materials

MIA KARTS BOOKS

Chemical Mechanical Planarization of Semiconductor Materials
  • Chemical Mechanical Planarization of Semiconductor Materials

    Chemical Mechanical Planarization of Semiconductor Materials

    $347.00 CAD
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    Book Details

    Format
    Hardcover
    Language
    English
    Category
    Microelectronics
    Condition
    New
    ISBN-13
    9783540431817
    ISBN-10
    3540431810

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    Product description

    ISBN: 3540431810

    Author: Oliver, M.R.

    Condition: New

    This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.
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    Chemical Mechanical Planarization of Semiconductor Materials

    $347.00 CAD
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