Glow Discharge Processes: Sputtering and Plasma Etching
MIA KARTS BOOKS
Glow Discharge Processes: Sputtering and Plasma Etching
Glow Discharge Processes: Sputtering and Plasma Etching
£112.00 GBP
Available
Book Details
- Format
- Hardcover
- Language
- English
- Category
- Electrical & Electronics
- Condition
- New
- ISBN-13
- 9780471078289
- ISBN-10
- 047107828X
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ISBN: 047107828X
Author: Chapman, Brian
Condition: New
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
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Glow Discharge Processes: Sputtering and Plasma Etching
£112.00 GBP
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