Computational Modeling in Semiconductor Processing (Artech House Materials Science Libr...
MIA KARTS BOOKS
- Vendor: Mia Karts
Computational Modeling in Semiconductor Processing (Artech House Materials Science Library)
Book Details
- Author
- M Meyyappan
- Publisher
- Artech House Publishers
- Format
- Hardcover
- Language
- English
- Category
- Semiconductors
- Condition
- New
- ISBN-13
- 9780890067079
- ISBN-10
- 0890067074
Free U.S. shipping on all orders. International shipping is calculated at checkout.
ISBN: 0890067074
Author: Meyyappan, M
Condition: New
This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes.
Have a question?
Computational Modeling in Semiconductor Processing (Artech House Materials Science Library)
You May Also Like
More in Science & Math
