EUV Lithography
MIA KARTS BOOKS
EUV Lithography
Book Details
- Format
- Hardcover
- Language
- English
- Category
- Semiconductors
- Condition
- Used
- ISBN-13
- 9780470471555
- ISBN-10
- 0470471557
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ISBN: 0470471557
Author: Bakshi, Vivek
Condition: Used
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
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EUV Lithography

