Run-to-Run Control in Semiconductor Manufacturing
MIA KARTS BOOKS
- Vendor: Mia Karts
Run-to-Run Control in Semiconductor Manufacturing
Book Details
- Author
- James Moyne
- Publisher
- CRC Press
- Format
- Hardcover
- Language
- English
- Category
- Semiconductors
- Condition
- New
- ISBN-13
- 9780849311789
- ISBN-10
- 0849311780
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ISBN: 0849311780
Author: Moyne, James
Condition: New
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
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Run-to-Run Control in Semiconductor Manufacturing
