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Semiconductor Devices: Physics and Technology
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ISBN: 0471333727
Author: Sze, Simon M.
Condition: New
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
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Semiconductor Devices: Physics and Technology

